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1.	Election of three Class II directors to our Board of Directors, each to serve on our Board of Directors for a term of three years or until his successor has been elected and qualified or until his earlier death, resignation or removal. The director nominees are:

2.	Advisory approval of the company's executive compensation;

4.	Ratification of the selection of KPMG LLP as FormFactor's independent registered public accounting firm for fiscal year 2017;

6.	Action upon such other matters as may properly come before the Annual Meeting or any adjournment or postponement thereof.

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A:

Our Board of Directors has made FormFactor’s proxy materials available to you on the Internet on or about April 10, 2017 or, upon your request, has delivered a printed set of the proxy materials to you by mail in connection with the solicitation of proxies by our Board for our 2017 Annual Meeting of Stockholders. FormFactor’s proxy materials are available on the Internet at http://viewproxy.com/formfactor/2017/. We will hold the Annual Meeting at our principal executive offices located at 7005 Southfront Road, Livermore, California 94551, on Friday, May 26, 2017, at 3:00 p.m., Pacific Daylight Savings Time.

A:	The proxy materials include our company's Notice of Annual Meeting of Stockholders, Proxy Statement and the 2016 Annual Report on Form 10-K, which includes our audited consolidated financial statements. If you requested a printed set of the proxy materials by mail, the proxy materials also included a proxy card for the Annual Meeting.

A:

We mailed a Notice of Internet Availability of Proxy Materials to our stockholders of record and beneficial owners of our common stock on or about April 10, 2017 to notify you that you can access the proxy materials over the Internet. Instructions for accessing the proxy materials through the Internet are set forth in the Notice of Internet Availability of Proxy Materials. As we did last year for our 2016 Annual Meeting of Stockholders, we sent the Notice instead of mailing a printed set of the proxy materials in accordance with the “Notice and Access” rules adopted by the U.S. Securities and Exchange Commission. If you wish to receive a printed set of the proxy materials, please follow the instructions set forth on the Notice of Internet Availability of Proxy Materials.

A:	The Notice of Internet Availability of Proxy Materials contains instructions on how to review our company's proxy materials on the Internet and instruct us to send future proxy materials to you by e-mail. Your election to receive future proxy materials by e-mail will remain in effect until you terminate it in writing.

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A:

The proxy rules of the U.S. Securities and Exchange Commission permit companies and intermediaries, such as brokers and banks, to satisfy proxy statement delivery requirements for two or more stockholders sharing an address by delivering one proxy statement to those stockholders. This procedure, known as “householding,” reduces the amount of duplicate information that stockholders receive and lowers our printing and mailing costs.

A:	We will hold the Annual Meeting at our principal executive offices located at 7005 Southfront Road, Livermore, California 94551, on Friday, May 26, 2017, at 3:00 p.m., Pacific Daylight Savings Time.

A:	The specific proposals to be considered and acted upon at the Annual Meeting are:

A:

If you are a stockholder of record of shares of our common stock, please bring photo identification with you. If you are a beneficial owner of shares of our common stock held in "street name," please bring photo identification and the "legal proxy," which is described below under the question "If I am a beneficial owner of shares held in 'street name,' how do I vote?", or other evidence of stock ownership (e.g., most recent account statement) with you. If you do not provide photo identification or if applicable, evidence of stock ownership, you will not be admitted to the Annual Meeting.

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A:

Only stockholders of record of our common stock at the close of business on March 30, 2017, which is the record date, are entitled to notice of, and to vote at, the Annual Meeting. If you own shares of FormFactor common stock as of the record date, then you can vote at the Annual Meeting. At the close of business on the record date, we had 71,672,152 shares of our common stock outstanding and entitled to vote, which were held by 201 stockholders of record.

A:	Holders of our common stock are entitled to one vote for each share held as of the record date.

A:	Most of our stockholders hold their shares of our common stock as a beneficial owner through a broker, bank or other nominee in "street name" rather than directly in their own name. As summarized below, there are some important distinctions between shares held of record and those owned beneficially in "street name."

A:	Voting by Internet.    You can vote through the Internet by following the instructions provided in the Notice of Internet Availability of Proxy Materials that you received. Go to http://viewproxy.com/formfactor/2017/, follow the instructions on the screen to log in, make your selections as instructed and vote.

A:	Voting by Internet.    You can vote over the Internet by following the voting instruction card provided to you by your broker, bank, trustee, or nominee.

A:	Stockholder of Record:    If you are a stockholder of record of shares of our common stock, and if you indicate when voting through the Internet that you wish to vote as recommended by our Board of Directors, or if you sign and return a proxy without giving specific voting instructions, then the proxy holders designated by our Board, who are officers

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A:

The ratification of the appointment of KPMG LLP as our independent registered public accounting firm for fiscal 2017 (Proposal No. 4) is a matter considered routine under applicable rules. A broker or other nominee may generally vote on routine matters, and therefore no broker non-votes are expected to exist in connection with Proposal No. 4. The election of directors (Proposal No. 1), the advisory approval of the company’s executive compensation (Proposal No. 2), the advisory vote on the frequency of the advisory vote on executive compensation (Proposal No. 3) and the approval of an amendment and restatement of our 2012 Equity Incentive Plan (Proposal No. 5) are matters considered non-routine under applicable rules. A bank, broker or other nominee cannot vote without instructions on non-routine matters, and therefore there may be broker non-votes on Proposal Nos. 1, 2, 3 and 5.

A:

A quorum is required for our stockholders to conduct business at the Annual Meeting. A majority of the outstanding shares of our common stock entitled to vote on the record date must be present in person or represented by proxy at the Annual Meeting in order to hold the meeting and conduct business. We will count your shares for purposes of determining whether there is a quorum if you are present in person at the Annual Meeting, if you have voted through the Internet, if you have voted by properly submitting a proxy card, or if the nominee holding your shares submits a proxy card. We will also count broker non-votes for the purpose of determining if there is a quorum.

A:

For Proposal No. 1, each of the three Class II directors will be elected if holders of shares of our common stock entitled to vote who are present in person or represented by proxy at the Annual Meeting cast more votes “for” such nominee’s election than the votes “against” such nominee’s election. You may not cumulate votes in the election of directors. If a nominee for director is not elected, the director shall offer to tender his or her resignation to the Board of Directors. The Governance Committee will make a recommendation to the Board of Directors to accept or reject the resignation or whether other action should be taken. The Board of Directors will act on the Governance Committee’s recommendation and publicly disclose its decision and the rationale behind it within 90 days from the date of the certification of the election results. The director who has so tendered his or her resignation will not participate in the Board of Directors’ decision.

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A:	Abstentions are counted for the purposes of determining whether a quorum is present at the Annual Meeting. Abstentions will not be counted either in favor of or against any of the proposals.

A:

You may change your vote or revoke your proxy at any time before the final vote at the Annual Meeting. You may vote again on a later date (a) through the Internet (only your latest Internet proxy submitted prior to the Annual Meeting will be counted), (b) by signing and returning a new proxy card with a later date if you are a stockholder of record, or (c) by attending the Annual Meeting and voting in person if you are a stockholder of record or if you are a beneficial owner and have obtained a proxy from the nominee holding your shares giving you the right to vote your shares. Your attendance at the Annual Meeting will not automatically revoke your proxy unless you vote again at the Annual Meeting or specifically request in writing that your prior proxy be revoked.

A:

In the event that sufficient votes in favor of the proposals are not received by the date of the Annual Meeting, the proxy holders, who are officers of our company, may propose one or more adjournments of the Annual Meeting to permit further solicitations of proxies. Any such adjournment would require the affirmative vote of holders of the majority of the shares of common stock present in person or represented by proxy at the Annual Meeting.

A:

Other than Proposal Nos. 1, 2, 3, 4 and 5, we are not aware of any other matters to be presented for a vote at the Annual Meeting. If you grant a proxy, the proxy holders, who are officers of our company, will have the authority in their discretion to vote your shares on any other matters that are properly presented for a vote at the Annual Meeting. If for any reason any of the Class II nominees are not available as a candidate for director, the proxy holders will vote your proxy for such other candidate or candidates as may be recommended by our Board of Directors.

A:

Proxy instructions, ballots and voting tabulations that identify individual stockholders are handled in a manner that protects your voting privacy. Your vote will not be disclosed either within our company or to third parties, except (a) as necessary to meet applicable legal requirements, (b) to allow for the tabulation and certification of votes, and (c) to facilitate a successful proxy solicitation. If stockholders provide written comments on their proxy cards, we may forward the proxy card(s) to our company's Corporate Secretary.

A:	We are soliciting the enclosed proxy for use at our Annual Meeting to be held on May 26, 2017 at 3:00 p.m., Pacific Daylight Time or at any adjournment thereof for the purposes set forth in this Proxy Statement.

A:

We will pay the entire cost for soliciting proxies to be voted at the Annual Meeting. We will pay brokers, banks and other nominees representing beneficial owners of shares of our common stock held in "street name" certain fees associated with delivering the Notice of Internet Availability of Proxy Materials, delivering printed proxy materials by mail to beneficial owners who request them and obtaining beneficial owners' voting instructions. In addition, our directors, officers and employees may also solicit proxies on our behalf by mail, telephone or in person. We will not pay any compensation to our directors, officers and employees for their proxy solicitation efforts, but we may reimburse them for reasonable out-of-pocket expenses in connection with any solicitation.

A:	Our Board of Directors recommends a vote FOR each of Proposal Nos. 1, 2, 4 and 5 and for holding the stockholder advisory vote on the company’s executive compensation EVERY 1 YEAR (Proposal No. 3). Specifically, our Board recommends a vote:

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A:	We intend to announce the voting results at the Annual Meeting and to report the results on a Form 8-K that we file with the U.S. Securities and Exchange Commission.

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(1)	Current member of the Governance Committee.

(2)	Current member of the Compensation Committee.

(3)	Current member of the Audit Committee.

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•	Size of the Board of Directors;

•	Frequency of meetings of the Board of Directors;

•	Committees of the Board of Directors;

•	Requirement that the Board of Directors be comprised of a majority of independent directors;

•	Requirement that the Audit and Compensation Committees of the Board of Directors be comprised entirely of independent directors;

•	Guidelines for determining director independence;

•	Limits on the number of other public company boards on which directors may serve;

•	Executive sessions of the Board of Directors wherein non-executive directors meet as a group without the presence of management directors;

•	Conflicts of interests;

•	Requirement that the performance of the Chief Executive Officer be evaluated annually and reviewed by the non-executive directors;

•	Change in position or responsibility in a director's principal occupation;

•	Stock holding requirements for directors and for executive officers;

•	Review of the performance of individual directors; and

•	Other matters uniquely germane to the work and responsibilities of the Board of Directors.

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(1)

The stock awards are restricted stock units that we awarded to our non-executive directors under our Equity Incentive Plan as described below under “Equity Compensation”. The vested portion of any award of restricted stock units will settle in shares of our common stock on the earlier of: (i) the date on which the award is fully vested, or (ii) the date that the director’s engagement with our company terminates (or, if the applicable date is not a market trading day during an open trading window under our company’s Statement of Policy regarding Insider Trading, thereafter on the first market trading day during an open trading window under our company’s policy, but no later than March 15th of the year following the scheduled settlement date or otherwise as determined under Section 409A of the Internal Revenue Code of 1986, as amended).

(2)

The amounts shown reflect the aggregate grant date fair value of all awards granted in fiscal year 2016 for financial statement reporting purposes in accordance with Financial Accounting Standards Board Topic No. ASC 718, Compensation - Stock Compensation. Assumptions used in the calculation of these amounts are described in Note 13 - Stock-Based Compensation to our company's consolidated financial statements in our Annual Report on Form 10-K for the fiscal year ended December 31, 2016.

(3)	A summary of options and restricted stock units outstanding as of December 31, 2016 for each of our non-executive directors is as follows:

(1)	The 'Stock Options Outstanding' as reported for Mr. DeLateur includes 190,570 shares related to options granted during Mr. DeLateur's tenure ending May 16, 2011 as the company's Chief Financial Officer.

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(2)	The ‘Stock Options Outstanding’ as reported for Mr. St. Dennis related to options granted during Mr. St. Dennis’ tenure ending December 27, 2014 as the company’s Chief Executive Officer.

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1.	Reducing cash compensation to the extent possible, by avoiding cash-consuming practices such as tax gross-ups, generous severance and retirement packages or guaranteed bonuses;

2.	Setting aggressive performance targets for cash incentive compensation to align performance and pay;

3.	Emphasizing equity compensation to align the interests of our named executive officers with those of our stockholders and incentivize them to improve operational performance and company value, including granting performance-based restricted stock unit awards; and

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•	We had outstanding grants of approximately 1,637,081 stock options, with a weighted average exercise price of $9.48 and weighted average remaining term of 2.2 years, and 2,946,520 unvested RSU and performance share awards (1);

•	We had 3,561,307 shares available for future issuance under our Equity Plan;

•	Our outstanding equity awards plus the shares available for future issuance under our Equity Plan (in each case, not including under our employee stock purchase plan), as listed above, represented approximately 11.4% of our outstanding shares of common stock (commonly referred to as the “overhang”) as of March 30, 2017; and

•	Subject to approval of the amended and restated Equity Plan by our stockholders, the outstanding awards as of the record date plus the shares available for future issuance under our Equity Plan (including the 6,000,000 additional shares being requested under the Equity Plan) will result in overhang of approximately 19.7%.

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•	Awards that are canceled, that expire or otherwise terminate without the issuance of shares;

•	RSUs, restricted shares, performance shares, performance units or deferred stock units that are forfeited; and

•	Unvested shares issued under the plan that are either forfeited by the participants or repurchased by us (at not more than the original exercise or issue price paid per share) pursuant to our repurchase rights under the plan.

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•	each person or entity known by us to own beneficially more than 5% of our common stock;

•	each of our directors;

•	each of our named executive officers; and

•	all of our directors and named executive officers as a group.

*	Represents beneficial ownership of less than 1%.

(1)	As reported in Amendment No. 13 to Schedule 13G/A of PRIMECAP Management Company reflecting beneficial ownership as of December 31, 2016, which was filed on January 4, 2017 with the Securities and Exchange

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(2)

As reported in Schedule 13G of Wellington Management Group LLP, Wellington Group Holdings LLP, Wellington Investment Advisors Holdings LLP and Wellington Management Company LLP (together, the “Wellington Funds”) reflecting beneficial ownership as of December 30, 2016, which was filed on February 9, 2017 with the Securities and Exchange Commission. The address of Wellington Management Group LLP is c/o Wellington Management Company LLP 280 Congress Street Boston, Massachusetts, 02210.

(3)	As reported in Amendment No. 5 to Schedule 13G/A of The Vanguard Group, Inc. reflecting beneficial ownership as of December 31, 2016, which was filed on February 13, 2017 with the Securities and Exchange Commission. The address of The Vanguard Group, Inc. is 100 Vanguard Boulevard, Malvern, Pennsylvania, 19355.

(4)	As reported in Amendment No. 2 to Schedule 13G/A of Dimensional Fund Advisors LP reflecting beneficial ownership as of December 31, 2016, which was filed on February 9, 2017 with the Securities and Exchange Commission. The address of Dimensional Fund Advisors LP is Building One, 6300 Bee Cave Road, Austin, Texas, 78746.

(5)	As reported in Amendment No. 12 to Schedule 13G/A of Vanguard Horizon Funds-Vanguard Capital Opportunity Fund reflecting beneficial ownership as of December 31, 2016, which was filed on February 13, 2017 with the Securities and Exchange Commission. The address of Vanguard Horizon Funds-Vanguard Capital Opportunity Fund is 100 Vanguard Boulevard, Malvern, Pennsylvania 19355.

(6)	As reported in Amendment No. 7 to Schedule 13G/A of BlackRock, Inc. reflecting beneficial ownership as of December 31, 2016, which was filed on January 24, 2017 with the Securities and Exchange Commission. The address of BlackRock, Inc. is 55 East, 52nd Street, New York, New York 10055.

(7)	Represents 164,993 shares held directly by Mr. St. Dennis, 226,050 shares issuable upon exercise of options, and 32,333 units convertible to common stock, all of which shares and units will be vested within 60 days of March 30, 2017.

(8)	Represents 273,577 shares held directly by Dr. Slessor, 225,000 shares issuable upon exercise of options, and 35,001 units convertible to common stock, all of which shares and units will be vested within 60 days of March 30, 2017.

(9)	Represents 210,398 shares held directly by Mr. Ludwig, 115,000 shares issuable upon exercise of options, and 25,000 units convertible to common stock, all of which shares and units will be vested within 60 days of March 30, 2017.

(10)	Represents 10,000 shares held directly by Mr. DeLateur, 86,000 shares issuable upon exercise of options, and 9,000 units convertible to common stock, all of which shares and units will be vested within 60 days of March 30, 2017.

(11)	Represents 36,102 shares held directly by Mr. Link, and 3,361 units convertible to common stock, all of which shares and units will be vested within 60 days of March 30, 2017.

(12)	Represents 12,000 shares held by the Maier Family Revocable Trust, 48,000 shares held directly by Mr. Maier and 9,000 units convertible to common stock, all of which shares and units will be vested within 60 days of March 30, 2017.

(13)	Represents 50,000 shares held directly by Mr. Rogas, 6,000 shares issuable upon exercise of options, and 9,000 units convertible to common stock, all of which shares and units will be vested within 60 days of March 30, 2017.

(14)	Represents 48,000 shares held directly by Mr. Zellner, 6,000 shares issuable upon exercise of options, and 9,000 units convertible to common stock, all of which shares and units will be vested within 60 days of March 30, 2017.

(15)	Represents 3,500 shares issuable upon exercise of options by Ms. Steven-Waiss, and 14,250 units convertible to common stock, all of which shares and units will be vested within 60 days of March 30, 2017.

(16)	Represents 853,070 shares held directly or in a revocable trust by the company's directors and named executive officers as a group, 667,550 shares issuable upon exercise of options, and 145,945 units convertible into common stock, all of which shares and units will be vested and exercisable within 60 days of March 30, 2017.

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(1)	Includes our Equity Incentive Plan and the Employee Stock Purchase Plan.

(2)

Represents 2,198,031 shares subject to outstanding options, 2,747,627 shares subject to outstanding time-based restricted stock units, and 364,994 shares subject to unearned performance-based restricted stock units. The unearned performance-based restricted stock units reflect the “Target” number of units that can be earned based on the award metric. Actual units earned may vary from 0% - 125% of the “Target” number. Excludes securities that may be issued under our Employee Stock Purchase Plan.

(3)	Excludes outstanding restricted stock units, both "time" and "performance" based awards, which do not have an exercise price.

(4)

Represents, as of December 31, 2016, 3,473,826 shares of our common stock reserved for future issuance under our Equity Incentive Plan and 1,467,751 shares of our common stock reserved for future issuance under our Employee Stock Purchase Plan. Securities available for future issuance under the Equity Incentive Plan reflects unearned performance-based restricted stock unit awards based on the metric "Target" level. Securities available for issuance will be adjusted accordingly based on the actual units earned.

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Independence.  The Compensation Committee is comprised solely of independent directors. Additionally, the Compensation Committee’s independent compensation consultant is retained directly by the Compensation Committee and performs no other services for our company’s management. No work performed by our independent compensation consultant in fiscal 2016 raised a conflict of interest as assessed by the Committee.

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Stock Ownership Guidelines. We have adopted stock ownership guidelines for our chief executive officer of at least the greater of (a) 10,000 shares or (b) shares equal in value to three times (3x) the chief executive officer's annual base salary, and for our other named executive officers of at least the greater of (a) 10,000 shares or (b) shares equal in value to two times (2x) the executive officer's annual base salary.

•	Performance Based Compensation. Payment of bonuses to our named executive officers and vesting of a portion of their equity compensation depends on the financial performance of the company.

•	Double-Trigger Change in Control Provision. The change in control and severance agreements provided to certain senior executives have “double-trigger” provisions and the level of severance is within or below standard levels. We do not provide any tax gross ups to our named executive officers in the event of a change in control.

•	No Hedging or Pledging.  Our insider trading policy generally prohibits hedging of company stock or pledging company stock as collateral of any loan.

•	Clawback Policy.  The Compensation Committee has adopted a clawback policy directed to incentive-based cash compensation.

•	Prohibition of Repricings.  Our Equity Incentive Plan prohibits stock option and stock appreciation rights, or SARs, repricings without the approval of stockholders.

•	Perquisites.  We did not pay special benefits or perquisites to our named executive officers in fiscal 2016.

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Risk Analysis.  Compensation programs are structured to avoid inappropriate risk taking by our executives and all employees by having the appropriate pay philosophy, peer group and market positioning to support reasonable business objectives. As a result, the Compensation Committee and its independent consultant have concluded that the risks arising from our company’s employee compensation program are reasonable, in the best interest of our stockholders, and not likely to have a material adverse effect on our company.

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•	base salary;

•	performance-based cash incentives that will only be awarded if we achieve the pre-determined financial goals as approved by the Compensation Committee; and

•	long-term, performance-based equity incentive awards that are issued in the form of both as performance-contingent RSUs, for encouraging long-term performance and delivering value for our stockholders over time, and time-vested RSUs, for retention and reinforcing our ownership culture. Long-term incentives make up a larger portion of total direct compensation.

•	Attract, retain and motivate highly skilled individuals based upon their contribution to the success of our company, and that of our stockholders;

•	Drive outstanding achievement of business objectives and reinforce our company's strong pay-for-performance culture; and

•	Align our named executive officers' interests with the long-term interests of our stockholders with a focus on performance that drives value creation for our stockholders.

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(1)	The Operating Income Result excludes bonus payments, stock compensation, acquisition and integration costs, intangible asset amortization and one-time non-recurring charges.

(2)	The Operating Income Target was adjusted in Q3 to reflect the expected increase in operating income as a result of the June 2016 Cascade Microtech, Inc. acquisition.

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•	Market Median—we will continue to pay consistent with the market median of our peers if warranted by performance. In particular:

◦	base salary will be targeted at approximately the median of our peer companies; and

◦	total direct compensation (base salary, annual cash incentives and long term equity incentives) will be targeted at the median of our peers, assuming achievement at plan. Higher levels of total direct compensation may be achieved should company performance exceed plan. Likewise, lower levels of total direct compensation may be earned should the company's performance does not meet the plan.

•	Variable Cash Incentive Awards—Achievement of variable cash incentive awards for fiscal 2017 for named executive officers will be measured solely on the basis of the achievement of pre-established financial goals with a specific threshold company performance requirement.

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•	Long-Term, Equity-Based Incentive Awards—The Committee intends that a portion of equity grants will be subject to a multi-year performance conditions.

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(1)

The dollar amounts shown are based on the fair value of the award as of the grant date. The fair value of our fiscal 2016 time-based stock awards was based on the closing fair market value of our common stock as reported on the NASDAQ Global Market on the grant date. The fair value of our performance-based stock awards (which are market-based stock awards) was derived under a Monte Carlo simulation model. Assumptions used in the calculation of these amounts are described in Note 13, Stock-Based Compensation, to our company's consolidated financial statements in our Annual Report on Form 10-K for the fiscal year ended December 31, 2016.

(2)	Represents amounts earned for performance in the applicable year under our company's Employee Incentive Plan, which is described under "Compensation Discussion and Analysis" in this Proxy Statement.

(3)	The amounts in this column represent matching contributions under our company 401(k) Plan.

(4)

The dollar amount shown includes time-based and market-based restricted stock unit awards. With respect to our performance-based restricted stock unit awards (which are market-based awards), the grant date valuation of $340,500 and $630,000 for Michael D. Slessor and Michael M. Ludwig, respectively, is derived from certain market performance criteria which is based on the Company's Total Shareholder Return (TSR) for the period from April 1, 2016 to March 31, 2019 relative to the TSR of the companies identified as being part of the S&P Semiconductor Select Industry Index. The payout range for the market-based restricted stock unit award is 0% to 125% with the grant date valuation representing the maximum achievement of 125%. Actual performance may result in fewer shares becoming earned and vested, which will reduce the value of the award.

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(1)	The threshold calculations for fiscal year 2016 assume that our company met only the minimum corporate performance under our Employee Incentive Plan.

(2)	The awards granted were approved by our Compensation Committee of the Board of Directors.

(3)

The fair value of our time-based stock awards was based on the closing fair market value of our common stock as reported on the NASDAQ Global Market on the grant date. The fair value of our performance-based stock awards (which are market-based awards) was derived under a Monte Carlo simulation model while the fair value of our time-based option awards was calculated using the Black-Scholes option pricing model.

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(1)	Vesting information is based on the original grant.

(2)	Market value was determined by multiplying the closing fair market value for a share of our company's common stock as of December 30, 2016, which was our company's last business day of fiscal year 2016, of $11.20, by the number of unvested and unearned units.

(3)	33.33% of the stock units vest each May 5 commencing May 5, 2015.

(4)	33.33% of the stock units vest each May 28 commencing May 28, 2016.

(5)	33.33% of the stock units vest each May 2 commencing May 2, 2017.

(6)	25% of the options vest each February 9 commencing February 9, 2016.

(7)

These units reflect a probable "Maximum" achievement based on the company's Total Shareholder Return (TSR) for the period from April 1, 2015 to March 31, 2017 relative to the TSR of the companies identified as being part of the S&P Semiconductor Select Industry Index. The payout range for the market-based restricted stock unit award is 0% to 125%. 100% of the earned units will vest on the certification date in 2017.

(8)

These units reflect a probable "Maximum" achievement based on the company's Total Shareholder Return (TSR) for the period from April 1, 2016 to March 31, 2019 relative to the TSR of the companies identified as being part of the S&P Semiconductor Select Industry Index. The payout range for the market-based restricted stock unit award is 0% to 125%. 100% of the earned units will vest on the certification date in 2019.

(9)	33.33% of the stock units vest each August 19 commencing August 19, 2017.

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lump sum cash severance payment equal to one year’s annual base salary and the greater of (a) the annual target bonus or (b) the annual target bonus multiplied by the average rate of annual bonus relative to target paid to officers covered by similar change of control severance agreements for the two most recently completed fiscal years (subject to the participating officer’s compliance with a confidentiality agreement and an agreement not to solicit employees of our company for one year after termination);

•	continuation of health benefits for one year (subject to the participating officer’s compliance with a confidentiality agreement and an agreement not to solicit employees of our company for one year after termination); and

•	fully accelerated vesting of all equity awards, with any forfeiture provisions and/or company right of repurchase automatically lapse in full.

•	"change of control" means the first to occur of any of the following events:

(i)

the consummation of a merger or consolidation of our company with any other corporation, other than a merger or consolidation which would result in the voting securities of our company outstanding immediately prior thereto continuing to represent (either by remaining outstanding or by being converted into or exchanged for voting securities of the surviving entity) more than 60% of the total voting power represented by the voting securities of our company or such surviving entity outstanding immediately after such merger or consolidation;

(ii)

(A) any approval by our stockholders of a plan of complete liquidation of our company, other than as a result of insolvency or (B) the consummation of the sale or disposition (or the last in a series of sales or dispositions) by our company of all or substantially all of our company’s assets, other than a sale or disposition to a wholly-owned direct or indirect subsidiary of our company and other than a sale or disposition which would result in the voting securities of our company outstanding immediately prior thereto continuing to represent (by being converted into or exchanged for voting securities of the entity to which such sale or disposition was made) more than 60% of the total voting power represented by the voting securities of the entity to which such sale or disposition was made after such sale or disposition; or

(iii)	any “person” (as defined in Sections 13(d) and 14(d) of the Securities Exchange Act of 1934) becoming the “beneficial owner” (as defined in Rule 13d-3 under the Securities Exchange Act of 1934), directly or indirectly, of securities of our company representing 40% or more of the total voting power represented by our company’s then outstanding voting securities; or

(iv)	during any period of two consecutive years after the effective date of the change of control severance agreement, the incumbent directors cease for any reason to constitute a majority of our Board of Directors.

•	“cause” means the occurrence of any of the following:

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(i)	any act of personal dishonesty taken by the employee in connection with his or her responsibilities as an employee which is intended to result in substantial personal enrichment of the employee and is reasonably likely to result in material harm to our company;

(ii)	the employee’s conviction of a felony;

(iii)	a willful act by the employee which constitutes misconduct and is materially injurious to our company; or

(iv)	continued willful violations by the employee of the employee’s obligations to our company after the employee has received a written demand for performance from our company which describes the basis for our company’s belief that the employee has not substantially performed his or her duties.

•	“good reason” means the occurrence of any of the following:

(i)	without the employee’s express written consent, a material reduction of the employee’s duties, position or responsibilities relative to the employee’s duties, position or responsibilities in effect immediately prior to the change of control;

(ii)	a reduction of more than 10% of the employee’s base salary or target bonus as in effect immediately prior to such reduction;

(iii)	without the employee’s express written consent, the relocation of the employee’s primary work location by more than 50 miles; or

(iv)	the failure of our company to obtain the assumption of the change of control severance agreement by a successor;

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(1)	Stock awards include time-based option and restricted stock unit awards and market (TSR) based restricted stock unit awards. The change of control payouts for the market (TSR) based restricted stock unit awards granted on May 28, 2015, May 2, 2016 and August 19, 2016 were calculated based on 125% of the “Target” level of the award metric.

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